Iordanov, Petar and Ringwood, John
Control-Oriented Modelling of an Experimental
Ar-O2 Plasma Process.
In: IEEE International Conference on Industrial Technology (ICIT), March, 2010, Valparaiso, Chile.
Development of a control-oriented model of an
experimental plasma reactor is presented in this paper. The
model structure is suitably partitioned in order to facilitate any
subsequent control design. In the model, the linear dynamical
part is conveniently separated from a static nonlinearity, which
in turn allows identification to be performed for both parts
independently. Validation results indicate that the model gives
a reasonable representation of the studied plasma process.
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